Invention Grant
- Patent Title: Shallow trench isolation structure
- Patent Title (中): 浅沟隔离结构
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Application No.: US13239375Application Date: 2011-09-21
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Publication No.: US08742549B2Publication Date: 2014-06-03
- Inventor: Ping-Chia Shih
- Applicant: Ping-Chia Shih
- Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Main IPC: H01L21/76
- IPC: H01L21/76 ; H01L23/58

Abstract:
A semiconductor structure includes: a substrate with at least a trench therein, wherein the trench is filled with an insulation layer; a first polysilicon layer disposed on the insulation layer and covering at least two opposite borders of a top surface of the insulation layer; a second polysilicon layer disposed above the first polysilicon layer and the substrate; and a dielectric layer disposed between the first and second polysilicon layers, wherein the first and second polysilicon layers are respectively shaped as first and second strips.
Public/Granted literature
- US20120007210A1 METHOD OF FORMING SHALLOW TRENCH ISOLATION STRUCTURE Public/Granted day:2012-01-12
Information query
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