Invention Grant
- Patent Title: Precursor for formation of europium-containing thin film, and method for forming europium-containing thin film
- Patent Title (中): 用于形成含铕薄膜的前体,以及形成含铕薄膜的方法
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Application No.: US14007474Application Date: 2012-02-23
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Publication No.: US08747965B2Publication Date: 2014-06-10
- Inventor: Takayuki Mogi , Yoshinori Kuboshima , Shintaro Higashi , Kaoru Kikukawa
- Applicant: Takayuki Mogi , Yoshinori Kuboshima , Shintaro Higashi , Kaoru Kikukawa
- Applicant Address: JP Sakado-shi
- Assignee: Kabushikikaisha Kojundokagaku Kenkyusho
- Current Assignee: Kabushikikaisha Kojundokagaku Kenkyusho
- Current Assignee Address: JP Sakado-shi
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2011-071397 20110329
- International Application: PCT/JP2012/054388 WO 20120223
- International Announcement: WO2012/132669 WO 20121004
- Main IPC: B05D3/06
- IPC: B05D3/06 ; C23C18/00 ; C23C18/14 ; C23C20/00

Abstract:
Provided are a novel europium compound which has a melting point of 180° C. or lower and can be stably supplied by bubbling in a chemical vapor deposition method or an atomic layer deposition method, a precursor for forming a europium-containing thin film based on the compound, and a method for forming a europium-containing thin film using this precursor. A europium-containing thin film is formed using bis(tetramethylmonoalkylcyclopentadienyl)europium as a precursor for forming a europium-containing thin film by a chemical vapor deposition method or anatomic layer deposition method.
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