Invention Grant
US08748819B2 Transmission electron microscopy system and method of operating a transmission electron microscopy system 有权
透射电子显微镜系统和透射电子显微镜系统的操作方法

Transmission electron microscopy system and method of operating a transmission electron microscopy system
Abstract:
A transmission electron microscopy system has an illumination system and an objective lens system. A first projection system images the diffraction plane of the objective lens system into a first intermediate diffraction plane. A second projection system images the first intermediate diffraction plane into a second intermediate diffraction plane. A first aperture located in the first intermediate diffraction plane has a central opening of a first radius. A bright field detector located in the second intermediate diffraction plane has a detection surface defined by an inner edge of a second radius. The first radius and the second radius define a maximum angle and a minimum angle, respectively, relative to the optical axis of directions of bright field electrons traversing the sample plane and detectable by the bright field detector.
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