Invention Grant
- Patent Title: Transmission electron microscopy system and method of operating a transmission electron microscopy system
- Patent Title (中): 透射电子显微镜系统和透射电子显微镜系统的操作方法
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Application No.: US13864600Application Date: 2013-04-17
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Publication No.: US08748819B2Publication Date: 2014-06-10
- Inventor: Gerd Benner
- Applicant: Carl Zeiss Microscopy GmbH
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agent Bruce D Riter
- Priority: DE102012007868 20120419
- Main IPC: H01J37/26
- IPC: H01J37/26 ; H01J37/063 ; H01J37/12

Abstract:
A transmission electron microscopy system has an illumination system and an objective lens system. A first projection system images the diffraction plane of the objective lens system into a first intermediate diffraction plane. A second projection system images the first intermediate diffraction plane into a second intermediate diffraction plane. A first aperture located in the first intermediate diffraction plane has a central opening of a first radius. A bright field detector located in the second intermediate diffraction plane has a detection surface defined by an inner edge of a second radius. The first radius and the second radius define a maximum angle and a minimum angle, respectively, relative to the optical axis of directions of bright field electrons traversing the sample plane and detectable by the bright field detector.
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