Invention Grant
- Patent Title: Ion sources, systems and methods
- Patent Title (中): 离子源，系统和方法
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Application No.: US13356854Application Date: 2012-01-24
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Publication No.: US08748845B2Publication Date: 2014-06-10
- Inventor: Billy W. Ward , John A. Notte , Louis S. Farkas , Randall G. Percival , Raymond Hill , Klaus Edinger , Lars Markwort , Dirk Aderhold , Ulrich Mantz
- Applicant: Billy W. Ward , John A. Notte , Louis S. Farkas , Randall G. Percival , Raymond Hill , Klaus Edinger , Lars Markwort , Dirk Aderhold , Ulrich Mantz
- Applicant Address: US NY Thornwood
- Assignee: Carl Zeiss Microscopy, LLC
- Current Assignee: Carl Zeiss Microscopy, LLC
- Current Assignee Address: US NY Thornwood
- Agency: Fish & Richardson P.C.
- Main IPC: H01J49/10
- IPC: H01J49/10 ; H01J49/08 ; H01J37/30 ; H01J27/26
Abstract:
Ion sources, systems and methods are disclosed.
Public/Granted literature
- US20120141693A1 ION SOURCES, SYSTEMS AND METHODS Public/Granted day:2012-06-07
Information query
