Invention Grant
US08766213B2 Automated method for coincident alignment of a laser beam and a charged particle beam
有权
用于激光束和带电粒子束的重合对准的自动方法
- Patent Title: Automated method for coincident alignment of a laser beam and a charged particle beam
- Patent Title (中): 用于激光束和带电粒子束的重合对准的自动方法
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Application No.: US13607329Application Date: 2012-09-07
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Publication No.: US08766213B2Publication Date: 2014-07-01
- Inventor: Marcus Straw , Mark Emerson
- Applicant: Marcus Straw , Mark Emerson
- Applicant Address: US OR Hillsboro
- Assignee: Fei Company
- Current Assignee: Fei Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Ki O.; Michael O. Scheinberg
- Main IPC: H01J37/00
- IPC: H01J37/00
Abstract:
A method and apparatus for aligning a laser beam coincident with a charged particle beam. The invention described provides a method for aligning the laser beam through the center of an objective lens and ultimately targeting the eucentric point of a multi-beam system. The apparatus takes advantage of components of the laser beam alignment system being positioned within and outside of the vacuum chamber of the charged particle system.
Public/Granted literature
- US20140070113A1 Automated Method for Coincident Alignment of a Laser Beam and a Charged Particle Beam Public/Granted day:2014-03-13
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