Invention Grant
US08766214B2 Method of preparing and imaging a lamella in a particle-optical apparatus
有权
在粒子光学装置中制备和成像薄片的方法
- Patent Title: Method of preparing and imaging a lamella in a particle-optical apparatus
- Patent Title (中): 在粒子光学装置中制备和成像薄片的方法
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Application No.: US13919656Application Date: 2013-06-17
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Publication No.: US08766214B2Publication Date: 2014-07-01
- Inventor: Brian Roberts Routh, Jr. , Peter Christiaan Tiemeijer , Bart Jozef Janssen , Thomas G. Miller , David Foord , Ivan Lazić
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg
- Priority: EP12178060 20120726
- Main IPC: H01J37/26
- IPC: H01J37/26 ; H01J37/28 ; H01J37/295

Abstract:
The invention relates to a method of preparing and imaging a sample using a particle-optical apparatus, equipped with an electron column and an ion beam column, a camera system, a manipulator. The method comprises the steps of deriving a first ptychographic image of the sample from a first electron image, thinning the sample, and forming a second ptychographic image of the sample. In an embodiment of the invention the seed image used for the second image is the first ptychographic image. In another embodiment the second ptychographic image is the image of the layer removed during the thinning. In another embodiment the inner potential of the sample is determined and dopant concentrations are determined.
Public/Granted literature
- US20140007307A1 METHOD OF PREPARING AND IMAGING A LAMELLA IN A PARTICLE-OPTICAL APPARATUS Public/Granted day:2014-01-02
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