Invention Grant
US08766216B2 Drawing apparatus, and article manufacturing method 失效
绘图装置和制品制造方法

Drawing apparatus, and article manufacturing method
Abstract:
A drawing apparatus include: a charged particle optical system configured to generate M×N charged particle beams; a limiting device configured to limit number of charged particle beams that the charged particle optical system emits toward a substrate; and a controller configured, if an abnormal beam that does not satisfy a use condition is present among the M×N charged particle beams, to control the limiting device such that only m rows, each of the m rows including n charged particle beams that are successive without intervention of the abnormal beam.
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