Invention Grant
- Patent Title: Drawing apparatus, and article manufacturing method
- Patent Title (中): 绘图装置和制品制造方法
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Application No.: US13607925Application Date: 2012-09-10
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Publication No.: US08766216B2Publication Date: 2014-07-01
- Inventor: Takayuki Kawamoto
- Applicant: Takayuki Kawamoto
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell, LLP
- Priority: JP2011-206558 20110921
- Main IPC: H01J37/302
- IPC: H01J37/302 ; H01J37/04

Abstract:
A drawing apparatus include: a charged particle optical system configured to generate M×N charged particle beams; a limiting device configured to limit number of charged particle beams that the charged particle optical system emits toward a substrate; and a controller configured, if an abnormal beam that does not satisfy a use condition is present among the M×N charged particle beams, to control the limiting device such that only m rows, each of the m rows including n charged particle beams that are successive without intervention of the abnormal beam.
Public/Granted literature
- US20130068962A1 DRAWING APPARATUS, AND ARTICLE MANUFACTURING METHOD Public/Granted day:2013-03-21
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