Invention Grant
US08770141B2 Substrate coating device with control section that synchronizes substrate moving velocity and delivery pump
有权
具有控制部分的基板涂层装置,其同步基板移动速度和输送泵
- Patent Title: Substrate coating device with control section that synchronizes substrate moving velocity and delivery pump
- Patent Title (中): 具有控制部分的基板涂层装置,其同步基板移动速度和输送泵
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Application No.: US13377606Application Date: 2010-04-19
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Publication No.: US08770141B2Publication Date: 2014-07-08
- Inventor: Yoshinori Ikagawa , Mitsunori Oda , Minoru Yamamoto , Takashi Kawaguchi , Hideo Hirata , Masaaki Tanabe
- Applicant: Yoshinori Ikagawa , Mitsunori Oda , Minoru Yamamoto , Takashi Kawaguchi , Hideo Hirata , Masaaki Tanabe
- Applicant Address: JP Okayama
- Assignee: Tazmo Co., Ltd.
- Current Assignee: Tazmo Co., Ltd.
- Current Assignee Address: JP Okayama
- Agency: Renner, Otto, Boisselle & Sklar, LLP
- Priority: JP2009-146778 20090619
- International Application: PCT/JP2010/056928 WO 20100419
- International Announcement: WO2010/146928 WO 20101223
- Main IPC: B05C11/00
- IPC: B05C11/00 ; C23C16/52 ; B05D1/02

Abstract:
A substrate coating device is provided which is capable of reducing non-uniform film thickness areas that take place in a coating start portion and a coating end portion during coating using a slit nozzle coater.The substrate coating device (10) includes at least a slider driving motor (4), a pump (8), a delivery state quantity measuring section (82), and a control section (5). The slider driving motor (4) scans a slit nozzle (1) over a substrate (100) at an established velocity relative to the substrate (100). The pump (8) controls the supply of the coating liquid to the slit nozzle (1). The delivery state quantity measuring section (82) is configured to measure a state quantity indicative of a delivery state of the coating liquid from the tip of the slit nozzle (1). The control section (5) corrects control information to be fed to the slider driving motor (4) in such a manner as to cancel out a difference between control information fed to the pump (8) and measurement information fed from the delivery state quantity measuring section (82) based on difference information indicative of the difference.
Public/Granted literature
- US20120085282A1 SUBSTRATE COATING DEVICE Public/Granted day:2012-04-12
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