Invention Grant
US08772714B2 Transmission electron microscope and method of observing TEM images
失效
透射电子显微镜及观察TEM图像的方法
- Patent Title: Transmission electron microscope and method of observing TEM images
- Patent Title (中): 透射电子显微镜及观察TEM图像的方法
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Application No.: US13667046Application Date: 2012-11-02
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Publication No.: US08772714B2Publication Date: 2014-07-08
- Inventor: Kazuya Yamazaki
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JP2011-241274 20111102
- Main IPC: H01J37/26
- IPC: H01J37/26

Abstract:
A transmission electron microscope (TEM) includes an electron beam source (2), an illumination lens (4), a first objective lens (6), a second objective lens (8), a selected area aperture (16), a projector lens (10), a detector (12), and a control portion (22). A first plane (17) is located between the second objective lens (8) and the projector lens (10). The control portion (22) performs first sets of processing for controlling the illumination lens (4) such that an electron beam (L) hits the sample (S), controlling the second objective lens (8) such that a diffraction pattern of the sample (S) is imaged onto the first plane (17), and controlling the projector lens (10) such that a TEM image of the sample (S) formed by the second objective lens (8) is focused onto a second plane where the light-sensitive portion (13) of the detector (12) is disposed.
Public/Granted literature
- US20130299696A1 Transmission Electron Microscope and Method of Observing TEM Images Public/Granted day:2013-11-14
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