Invention Grant
US08795839B2 Repair method for optical elements having a coating and corresponding optical elements
有权
具有涂层和对应的光学元件的光学元件的修复方法
- Patent Title: Repair method for optical elements having a coating and corresponding optical elements
- Patent Title (中): 具有涂层和对应的光学元件的光学元件的修复方法
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Application No.: US12350474Application Date: 2009-01-08
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Publication No.: US08795839B2Publication Date: 2014-08-05
- Inventor: Thure Boehm
- Applicant: Thure Boehm
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Edell, Shapiro & Finnan, LLC
- Priority: DE102008003533 20080108
- Main IPC: G02B1/10
- IPC: G02B1/10 ; B05D3/00 ; B05D3/06 ; B05D3/14 ; B05D5/06 ; B32B17/00 ; G02B1/02

Abstract:
A method for repairing optical elements having a coating, in which the coating is fully or partially removed or left on the optical element, a polishing layer being provided in the coating or a polishing layer being applied, which allows simple processing of the surface to achieve high geometrical accuracy and lower surface roughness. A new coating is applied onto the corresponding polishing layer. Also addressed are corresponding optical elements, including optical elements recycled according to the method.
Public/Granted literature
- US20090174934A1 REPAIR METHOD FOR OPTICAL ELEMENTS HAVING A COATING AND CORRESPONDING OPTICAL ELEMENTS Public/Granted day:2009-07-09
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