Invention Grant
- Patent Title: Ion implanter
- Patent Title (中): 离子注入机
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Application No.: US13689148Application Date: 2012-11-29
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Publication No.: US08796649B2Publication Date: 2014-08-05
- Inventor: Manuel A. Jerez , Carlos F. Borges
- Applicant: Manuel A. Jerez , Carlos F. Borges
- Applicant Address: US NY Mineola
- Assignee: ion Technology Solutions, LLC
- Current Assignee: ion Technology Solutions, LLC
- Current Assignee Address: US NY Mineola
- Agency: Carella, Byrne, et al
- Agent Francis C. Hand
- Main IPC: H01J37/317
- IPC: H01J37/317 ; H01L21/265 ; H01J27/08 ; H01J1/88 ; H01J7/26
Abstract:
The support and electrode assemblies of the ion implanter are cooled by circulating a coolant through these parts during operation. The support for the arc chamber includes a one piece block of aluminum through which coolant passes and a hollow rectangular post on which the arc chamber sits with a space therebetween.
Public/Granted literature
- US20140145581A1 Ion Implanter Public/Granted day:2014-05-29
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