Invention Grant
US08796733B2 Low voltage tunnel field-effect transistor (TFET) and method of making same
有权
低电压隧道场效应晶体管(TFET)及其制造方法
- Patent Title: Low voltage tunnel field-effect transistor (TFET) and method of making same
- Patent Title (中): 低电压隧道场效应晶体管(TFET)及其制造方法
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Application No.: US13206187Application Date: 2011-08-09
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Publication No.: US08796733B2Publication Date: 2014-08-05
- Inventor: Alan C. Seabaugh , Patrick Fay , Huili (Grace) Xing , Guangle Zhou , Yeqing Lu , Mark A. Wistey , Siyuranga Koswatta
- Applicant: Alan C. Seabaugh , Patrick Fay , Huili (Grace) Xing , Guangle Zhou , Yeqing Lu , Mark A. Wistey , Siyuranga Koswatta
- Applicant Address: US IN Notre Dame US NY Armonk
- Assignee: University of Notre Dame du Lac,International Business Machines Corporation
- Current Assignee: University of Notre Dame du Lac,International Business Machines Corporation
- Current Assignee Address: US IN Notre Dame US NY Armonk
- Agency: Greenberg Traurig, LLP
- Main IPC: H01L29/66
- IPC: H01L29/66

Abstract:
A low voltage tunnel field effect transistor includes a p-n tunnel junction, a gate-dielectric, a gate, a source-contact, and a drain-contact. The p-n tunnel junction includes a depletion region interfacing together a source-layer and a drain-layer. The depletion region includes a source-tunneling-region of the source-layer and a drain-tunneling-region of the drain-layer. When no external electric field is imposed, the depletion region of the p-n tunnel junction has an internal electric field that substantially points towards the source-tunneling-region and the drain-tunneling-region. The gate-dielectric is interfaced directly onto the drain-tunneling-region such that the drain-tunneling-region is between the source-tunneling-region and the gate-dielectric. The gate is interfaced onto the gate-dielectric such that the gate is configured to impose an external electric field which is oriented substantially in parallel to the internal electric field of the depletion region.
Public/Granted literature
- US20120032227A1 LOW VOLTAGE TUNNEL FIELD-EFFECT TRANSISTOR (TFET) AND METHOD OF MAKING SAME Public/Granted day:2012-02-09
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