Invention Grant
- Patent Title: EUV mirror module with a nickel electroformed curved mirror
- Patent Title (中): EUV镜面模组，带镍电铸曲面镜
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Application No.: US12799016Application Date: 2010-04-16
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Publication No.: US08810775B2Publication Date: 2014-08-19
- Inventor: Jacques Kools
- Applicant: Jacques Kools
- Applicant Address: IT Bosisio Parini (LC)
- Assignee: Media Lario S.R.L.
- Current Assignee: Media Lario S.R.L.
- Current Assignee Address: IT Bosisio Parini (LC)
- Agency: Opticus IP Law PLLC
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B7/18 ; G02B5/08
Abstract:
An EUV mirror module is disclosed that comprises a substrate with a curved upper surface and a curved electroformed mirror. A self-adjusting bonding material is disposed between the substrate and the electroformed mirror. The bonding material is flowable at a melting temperature and self-adjusts to conformally fill the region between substrate to the electroformed mirror and bond the substrate and the electroformed mirror. The substrate may have at least one cooling channel for cooling the mirror module.
Public/Granted literature
- US20110255068A1 EUV mirror module Public/Granted day:2011-10-20
Information query
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