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US08820169B2 Compensation of stress effects on pressure sensor components 有权
对压力传感器部件的应力影响的补偿

Compensation of stress effects on pressure sensor components
Abstract:
Pressure sensors having components with reduced variations due to stresses caused by various layers and components that are included in the manufacturing process. In one example, a first stress in a first direction causes a variation in a component. A second stress in a second direction is applied, thereby reducing the variation in the component. The first and second stresses may be caused by a polysilicon layer, while the component may be a resistor in a Wheatstone bridge.
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