Invention Grant
- Patent Title: Method for manufacturing an oxide thin film
- Patent Title (中): 氧化物薄膜的制造方法
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Application No.: US13083299Application Date: 2011-04-08
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Publication No.: US08821967B2Publication Date: 2014-09-02
- Inventor: Jih-Jen Wu , Wei-Ting Wu , Ching-Mei Wang , Jen-Sue Chen
- Applicant: Jih-Jen Wu , Wei-Ting Wu , Ching-Mei Wang , Jen-Sue Chen
- Applicant Address: TW Tainan
- Assignee: National Cheng Kung University
- Current Assignee: National Cheng Kung University
- Current Assignee Address: TW Tainan
- Agency: Morris, Manning & Martin, LLP
- Agent Tim Tingkang Xia, Esq.
- Priority: TW99133704A 20101004; TW99133705A 20101004; TW99133706A 20101004; TW99133707A 20101004; TW99133708A 20101004
- Main IPC: B05D5/12
- IPC: B05D5/12 ; B05D3/02 ; C23C24/08 ; C23C18/12
Abstract:
A method for manufacturing an oxide thin film comprises: providing a coating material composed of a first precursor material, a fuel material and a solvent; coating the coating material on a substrate; and annealing the coated coating material on the substrate to convert the coated coating material into an oxide thin film.
Public/Granted literature
- US20120082782A1 METHOD FOR MANUFACTURING AN OXIDE THIN FILM Public/Granted day:2012-04-05
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