Invention Grant
- Patent Title: Transporting device, in particular for transporting sheet-like substrates through a coating installation
- Patent Title (中): 运输装置，特别是用于通过涂布装置输送片状基材
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Application No.: US13606050Application Date: 2012-09-07
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Publication No.: US08821977B2Publication Date: 2014-09-02
- Inventor: Hubertus von der Waydbrink , Georg Laimer , Siegfried Scheibe , Ricky C. Powell , James Ernest Hinkle , James B. Foote
- Applicant: Hubertus von der Waydbrink , Georg Laimer , Siegfried Scheibe , Ricky C. Powell , James Ernest Hinkle , James B. Foote
- Applicant Address: US OH Perrysburg
- Assignee: First Solar, Inc.
- Current Assignee: First Solar, Inc.
- Current Assignee Address: US OH Perrysburg
- Agency: Dickstein Shapiro LLP
- Priority: DE102005016407 20050408; DE102006011517 20060310
- Main IPC: C23C16/00
- IPC: C23C16/00 ; B05C13/00
Abstract:
A transport device and method of transporting a substrate using a rotatable shaft and baffles may be used to extend cleaning intervals for the transport device and reduce deposition of a vapor deposition material upon the transport device.
Public/Granted literature
- US20130056333A1 TRANSPORTING DEVICE, IN PARTICULAR FOR TRANSPORTING SHEET-LIKE SUBSTRATES THROUGH A COATING INSTALLATION Public/Granted day:2013-03-07
Information query
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