Invention Grant
US08822952B2 Charged particle beam apparatus having noise absorbing arrangements
有权
具有噪声吸收装置的带电粒子束装置
- Patent Title: Charged particle beam apparatus having noise absorbing arrangements
- Patent Title (中): 具有噪声吸收装置的带电粒子束装置
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Application No.: US13883764Application Date: 2011-10-14
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Publication No.: US08822952B2Publication Date: 2014-09-02
- Inventor: Daisuke Muto , Masanori Watanabe , Masaru Matsushima , Shuichi Nakagawa , Masahiro Akatsu , Yusuke Tanba , Satoshi Okada
- Applicant: Daisuke Muto , Masanori Watanabe , Masaru Matsushima , Shuichi Nakagawa , Masahiro Akatsu , Yusuke Tanba , Satoshi Okada
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2010-250386 20101109
- International Application: PCT/JP2011/005748 WO 20111014
- International Announcement: WO2012/063406 WO 20120518
- Main IPC: H01J37/16
- IPC: H01J37/16 ; H01J37/28 ; H01J37/26 ; G10K11/172
Abstract:
Charged particle beam apparatus arrangements in which either a first noise absorber which provides noise absorbing performance specialized for a first frequency range including the natural frequency of the charged particle beam apparatus as reference, or a second noise absorber which provides noise absorbing performance specialized for a second frequency range including the frequency of acoustic standing waves generated within the cover as reference, or both of the first and second noise absorbers is/are disposed within a cover of the charged particle beam apparatus.
Public/Granted literature
- US20130228686A1 CHARGED PARTICLE BEAM APPARATUS Public/Granted day:2013-09-05
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