Invention Grant
- Patent Title: Cover for a roller
- Patent Title (中): 盖一个滚筒
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Application No.: US12502615Application Date: 2009-07-14
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Publication No.: US08826851B2Publication Date: 2014-09-09
- Inventor: Mark Andreas , Joerg Kerschbaumer , Stefan Schneider , Arno Zindel
- Applicant: Mark Andreas , Joerg Kerschbaumer , Stefan Schneider , Arno Zindel
- Applicant Address: CH Trubbach
- Assignee: Oberlikon Solar AG, Trubbach
- Current Assignee: Oberlikon Solar AG, Trubbach
- Current Assignee Address: CH Trubbach
- Agency: KPPB LLP
- Main IPC: B05C13/02
- IPC: B05C13/02 ; H01L31/18 ; C23C16/458 ; C23C16/54

Abstract:
A cover for a roller having at least one roller (2) for transporting a substrate (1) in a deposition system and at least one cover means (6), wherein the roller is retractable away from the substrate and the cover means is adapted for at least partly covering the retracted roller against contamination by a substance present in the deposition system. The cover for a roller has the advantage that the uptime of the deposition system is increased.
Public/Granted literature
- US20100016136A1 COVER FOR A ROLLER Public/Granted day:2010-01-21
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