Invention Grant
- Patent Title: Time-of-flight spectrometry and spectroscopy of surfaces
- Patent Title (中): 飞行时间谱和表面光谱
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Application No.: US12956665Application Date: 2010-11-30
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Publication No.: US08829428B2Publication Date: 2014-09-09
- Inventor: J. Albert Schultz , Thomas F. Egan , Steven Ulrich , Kelley L. Waters
- Applicant: J. Albert Schultz , Thomas F. Egan , Steven Ulrich , Kelley L. Waters
- Applicant Address: US TX Houston
- Assignee: Ionwerks, Inc.
- Current Assignee: Ionwerks, Inc.
- Current Assignee Address: US TX Houston
- Agency: Fulbright & Jaworski LLP
- Main IPC: H01J49/40
- IPC: H01J49/40 ; H01J49/00 ; H01J49/14 ; G01N23/225
Abstract:
Described is an analytical method and apparatus for counting and measuring the flight time of secondary electrons, secondary ions and neutrals, scattered ions and/or neutrals and for correlating coincidences between these while maintaining a continuous un-pulsed, micro-focused, primary particle beam for impinging a surface for purposes of microprobe imaging and microanalysis.
Public/Granted literature
- US20110147578A1 TIME-OF-FLIGHT SPECTROMETRY AND SPECTROSCOPY OF SURFACES Public/Granted day:2011-06-23
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