Invention Grant
- Patent Title: Rotating-element ellipsometer and method for measuring properties of the sample using the same
- Patent Title (中): 旋转元件椭偏仪及使用其的样品的性质测定方法
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Application No.: US13587442Application Date: 2012-08-16
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Publication No.: US08830463B2Publication Date: 2014-09-09
- Inventor: Yong Jai Cho , Won Che Gal , Hyun Mo Cho
- Applicant: Yong Jai Cho , Won Che Gal , Hyun Mo Cho
- Applicant Address: KR Daejeon
- Assignee: Korea Research Institute of Standards and Science
- Current Assignee: Korea Research Institute of Standards and Science
- Current Assignee Address: KR Daejeon
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2011-0081475 20110817
- Main IPC: G01J4/00
- IPC: G01J4/00 ; G01N21/21
Abstract:
Provided is a real-time spectroscopic ellipsometer capable of obtaining information on properties of a sample, a nano pattern shape, in real time by measuring and analyzing, for a plurality of wavelengths, a change in a polarization state of incident light generated while being reflected or transmitted due to the sample when light having a specific polarization component is incident to the sample.
Public/Granted literature
- US20130044318A1 ROTATING-ELEMENT ELLIPSOMETER AND METHOD FOR MEASURING PROPERTIES OF THE SAMPLE USING THE SAME Public/Granted day:2013-02-21
Information query
