Invention Grant
US08841613B2 Method and system for 4D tomography and ultrafast scanning electron microscopy
有权
4D断层扫描和超快扫描电子显微镜的方法和系统
- Patent Title: Method and system for 4D tomography and ultrafast scanning electron microscopy
- Patent Title (中): 4D断层扫描和超快扫描电子显微镜的方法和系统
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Application No.: US12884001Application Date: 2010-09-16
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Publication No.: US08841613B2Publication Date: 2014-09-23
- Inventor: Ahmed H. Zewail , Oh-Hoon Kwon , Omar Farghaly Mohammed Abdelsaboor , Ding-Shyue Yang
- Applicant: Ahmed H. Zewail , Oh-Hoon Kwon , Omar Farghaly Mohammed Abdelsaboor , Ding-Shyue Yang
- Applicant Address: US CA Pasadena
- Assignee: California Institute of Technology
- Current Assignee: California Institute of Technology
- Current Assignee Address: US CA Pasadena
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J37/285 ; H01J37/22

Abstract:
A 4D electron tomography system includes a stage having one or more degrees of freedom, an electron source, and electron optics operable to direct electron pulses to impinge on a sample supported on the stage. A pulse of the electron pulses impinges on the sample at a first time. The system also includes a laser system and optics operable to direct optical pulses to impinge on the sample. A pulse of the optical pulses impinges on the sample at a second time. The system further includes a detector operable to receive the electron pulses passing through the sample, a controller operable to independently modify an orientation of the stage and at least one of the first time or the second time, a memory operable to store sets of images, and a processor operable to form a 4D tomographic image set from the sets of images.
Public/Granted literature
- US20110284744A1 METHOD AND SYSTEM FOR 4D TOMOGRAPHY AND ULTRAFAST SCANNING ELECTRON MICROSCOPY Public/Granted day:2011-11-24
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