Invention Grant
- Patent Title: Method for the detection of the irradiance distribution in an extreme ultraviolet light source device and an extreme ultraviolet light source device
- Patent Title (中): 用于检测极紫外光源装置和极紫外光源装置中的辐照度分布的方法
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Application No.: US13284277Application Date: 2011-10-28
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Publication No.: US08841625B2Publication Date: 2014-09-23
- Inventor: Daiki Yamatani
- Applicant: Daiki Yamatani
- Applicant Address: JP Tokyo
- Assignee: Ushio Denki Kabushiki Kaisha
- Current Assignee: Ushio Denki Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent David S. Safran
- Priority: JP2010-251626 20101110
- Main IPC: G01J1/42
- IPC: G01J1/42 ; G03F7/20 ; G01J1/06 ; G02B27/09 ; G01J1/58
Abstract:
An extreme ultraviolet light source device, comprising a collector mirror focusing extreme ultraviolet radiation at a focal point, wherein a porous plate having a plurality of through holes arranged such that only radiation focusing at said focal point passes is provided insertably between said collector mirror and said focal point on an optical axis of said collector mirror, and a detection means is provided to receive radiation having passed through said porous plate and to detect an intensity of said received radiation, and a method for detecting an irradiance distribution in an extreme ultraviolet light source device.
Public/Granted literature
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