Invention Grant
- Patent Title: Scanning transmission type electron microscope
- Patent Title (中): 扫描透射型电子显微镜
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Application No.: US13806805Application Date: 2011-05-16
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Publication No.: US08866078B2Publication Date: 2014-10-21
- Inventor: Hisanao Akima , Takaho Yoshida
- Applicant: Hisanao Akima , Takaho Yoshida
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2010-152964 20100705
- International Application: PCT/JP2011/061232 WO 20110516
- International Announcement: WO2012/005056 WO 20120112
- Main IPC: H01J37/26
- IPC: H01J37/26 ; H01J37/153 ; H01J37/28

Abstract:
Disclosed is a scanning transmission type electron microscope provided with a scanning transmission electron microscope provided with an aberration corrector 805 for correcting the aberration of an electron-optical system that irradiates electron beams to a sample (808); a bright field image detector (813) for detecting electron beams that have transmitted through the sample; a camera (814); and an information processing apparatus (703) for processing signals detected by the detectors. The information processing apparatus divides a Ronchigram obtained by the detectors into a plurality of areas, and calculates a feature vector (W; 903), which reflects the magnitude and direction of an on-axis secondary comma aberration (B2), from the values of an off-axis defocus {C1(τ)} to be obtained for each of the plurality of areas, and the distance (τ) from the center of the Ronchigram to the center of the plurality of areas, and also calculates the correcting condition for the on-axis secondary comma aberration with the feature vector. In such a way, a scanning transmission type electron microscope that can correct he on-axis secondary comma aberration thereof in a short period of time, and efficiently, was able to be provided.
Public/Granted literature
- US20130099117A1 SCANNING TRANSMISSION TYPE ELECTRON MICROSCOPE Public/Granted day:2013-04-25
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