Invention Grant
US08867036B2 Laser light deflection amount detecting apparatus, displacement measuring apparatus, method for manufacturing mold for molding optical element, and optical element
有权
激光偏转量检测装置,位移测量装置,用于制造用于模制光学元件的模具的方法和光学元件
- Patent Title: Laser light deflection amount detecting apparatus, displacement measuring apparatus, method for manufacturing mold for molding optical element, and optical element
- Patent Title (中): 激光偏转量检测装置,位移测量装置,用于制造用于模制光学元件的模具的方法和光学元件
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Application No.: US13543002Application Date: 2012-07-06
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Publication No.: US08867036B2Publication Date: 2014-10-21
- Inventor: Teppei Agawa
- Applicant: Teppei Agawa
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2011-159246 20110720
- Main IPC: G01J4/00
- IPC: G01J4/00 ; B23Q17/24 ; G01B11/26 ; G01B11/00

Abstract:
A laser light deflection amount detecting apparatus detects an amount of deflection of laser light and includes a laser light source, a first polarizing beam splitter that splits the laser light emitted by the laser light source, an optical system that rotates at least one of linearly polarized components around an optical axis orthogonally and that acquires a combined light of the linearly polarized components at least one of which is rotated, a light blocking member, a second polarizing beam splitter, and two light receiving elements that measure an amount of light of the polarized components resulting from the splitting by the second polarizing beam splitter.
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