Invention Grant
- Patent Title: Process for producing an integrated circuit
- Patent Title (中): 集成电路的制造方法
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Application No.: US13811792Application Date: 2011-07-22
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Publication No.: US08877622B2Publication Date: 2014-11-04
- Inventor: Thierry Poiroux , Sébastien Barnola , Yves Morand
- Applicant: Thierry Poiroux , Sébastien Barnola , Yves Morand
- Applicant Address: FR Paris
- Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee Address: FR Paris
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: FR1056070 20100723
- International Application: PCT/FR2011/051779 WO 20110722
- International Announcement: WO2012/010812 WO 20120126
- Main IPC: H01L21/3205
- IPC: H01L21/3205 ; H01L21/4763 ; H01L21/8234 ; H01L27/11 ; H01L27/115 ; H01L21/768

Abstract:
A process for producing an integrated circuit on the surface of a substrate, the process including: producing a first layer, including active zones and insulating zones, on the surface of the substrate; producing gate zones on the surface of the first layer, the gate zones each being surrounded by insulating spacers; producing source/drain electrodes; producing a dielectric layer between the insulating spacers, the dielectric layer having an upper surface level with the upper surfaces of the gate zones; partially etching each gate zone so as to lower the upper surface of a first part of each gate zone; and depositing an insulating dielectric layer on the first parts of the gate zones.
Public/Granted literature
- US20130252412A1 PROCESS FOR PRODUCING AN INTEGRATED CIRCUIT Public/Granted day:2013-09-26
Information query
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