Invention Grant
- Patent Title: Inductively-coupled plasma device
- Patent Title (中): 感应耦合等离子体装置
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Application No.: US13539829Application Date: 2012-07-02
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Publication No.: US08878434B2Publication Date: 2014-11-04
- Inventor: James A. Gilbert
- Applicant: James A. Gilbert
- Applicant Address: US MA Mansfield
- Assignee: Covidien LP
- Current Assignee: Covidien LP
- Current Assignee Address: US MA Mansfield
- Main IPC: H05H1/30
- IPC: H05H1/30 ; H01J37/32 ; H05H1/46 ; H05H1/24

Abstract:
A plasma device configured to receive ionizable media is disclosed. The plasma device includes a first pair of dielectric substrates each having an inner surface and an outer surface. The first pair of dielectric substrates is disposed in spaced, parallel relation relative to one another with the inner surfaces thereof facing one another. The device also includes a first pair of spiral coils each disposed on the inner surface of the dielectric substrates. The first pair of spiral coils is configured to couple to a power source and configured to inductively couple to an ionizable media passed therebetween to ignite the ionizable media to form a plasma effluent.
Public/Granted literature
- US20120268010A1 Inductively-Coupled Plasma Device Public/Granted day:2012-10-25
Information query
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