Provided is a charged particle beam device wherein a secondary signal generated from an alignment pattern having known coordinate values in a sample coordinate system is detected, and a positional deviation quantity between the coordinate system of a sample (10) and the coordinate system of a stage (21) is calculated so as to generate coordinate correction data. At the time of observing a sample image, the secondary signal generated from the alignment pattern is detected at least once so as to perform realignment, and the coordinate correction data is updated. Thus, the charged particle beam device performs long-time inspection at a high observation magnification by accurately correcting the sample coordinate information obtained by temperature change, while suppressing device cost increase and throughput deterioration.