Invention Grant
- Patent Title: Projection objective for a microlithographic projection exposure apparatus
- Patent Title (中): 微光刻投影曝光装置的投影物镜
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Application No.: US13272440Application Date: 2011-10-13
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Publication No.: US08902407B2Publication Date: 2014-12-02
- Inventor: Norbert Wabra , Robert Eder
- Applicant: Norbert Wabra , Robert Eder
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Main IPC: G03B27/32
- IPC: G03B27/32 ; G03B27/54 ; G03F7/20

Abstract:
A projection objective of a microlithographic projection exposure apparatus contains a plurality of optical elements arranged in N>−2 successive sections A1 to AN of the projection objective which are separated from one another by pupil planes or intermediate image planes. According to the invention, in order to correct a wavefront deformation, at least two optical elements each have an optically active surface locally reprocessed aspherically. A first optical element is in this case arranged in one section Aj, j=1 . . . N and a second optical element is arranged in another section Ak, k=1 . . . N, the magnitude difference |k−j| being an odd number.
Public/Granted literature
- US20120033296A1 PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS Public/Granted day:2012-02-09
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