Invention Grant
- Patent Title: Organoaluminum materials for forming aluminum oxide layer from coating composition that contains organic solvent
- Patent Title (中): 用于由含有有机溶剂的涂料组合物形成氧化铝层的有机铝材料
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Application No.: US13947129Application Date: 2013-07-22
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Publication No.: US08927439B1Publication Date: 2015-01-06
- Inventor: Deyan Wang , Kathleen M. O'Connell , Peter Trefonas, III
- Applicant: Rohm and Haas Electronic Materials LLC
- Applicant Address: US MA Marlborough
- Assignee: Rohm and Haas Electronic Materials LLC
- Current Assignee: Rohm and Haas Electronic Materials LLC
- Current Assignee Address: US MA Marlborough
- Agent S. Matthew Cairns
- Main IPC: H01L21/473
- IPC: H01L21/473 ; H01L51/56 ; H01L21/02 ; H01L51/52 ; H01L51/44

Abstract:
Organoaluminum coating compositions are used to deposit films on various substrates, which films are subsequently cured to form oxide films useful in a variety of manufacturing applications, particularly where a gas barrier may be used.
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