Invention Grant
- Patent Title: Systems and methods providing electron beam writing to a medium
- Patent Title (中): 向介质提供电子束写入的系统和方法
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Application No.: US14088155Application Date: 2013-11-22
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Publication No.: US08927947B2Publication Date: 2015-01-06
- Inventor: Wen-Chuan Wang , Shy-Jay Lin , Jaw-Jung Shin , Burn Jeng Lin
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01J37/302
- IPC: H01J37/302 ; H01J37/30

Abstract:
A method for electron-beam writing to a medium includes positioning the medium within an e-beam writing machine so that the medium is supported by a stage and is exposed to an e-beam source. The method also includes writing a pattern to the medium using a plurality of independently-controllable beams of the e-beam source, in which the pattern comprises a plurality of parallel strips. Each of the parallel strips is written using multiple ones of the independently-controllable beams.
Public/Granted literature
- US20140217305A1 SYSTEMS AND METHODS PROVIDING ELECTRON BEAM WRITING TO A MEDIUM Public/Granted day:2014-08-07
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