Invention Grant
- Patent Title: Optical sensor device and method of manufacturing the same
- Patent Title (中): 光传感器装置及其制造方法
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Application No.: US13669858Application Date: 2012-11-06
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Publication No.: US08933386B2Publication Date: 2015-01-13
- Inventor: Hitoshi Kamamori , Sadao Oku , Hiroyuki Fujita , Koji Tsukagoshi , Keiichiro Hayashi
- Applicant: Seiko Instruments Inc.
- Applicant Address: JP
- Assignee: Seiko Instruments Inc.
- Current Assignee: Seiko Instruments Inc.
- Current Assignee Address: JP
- Agency: Adam & Wilks
- Priority: JP2011-246671 20111110
- Main IPC: G01J1/42
- IPC: G01J1/42 ; H01L31/0203

Abstract:
Provided is a high-reliability, compact, and low-cost optical sensor device. The optical sensor device includes a glass lid substrate (2), a glass substrate (9) with a cavity having divided and exposed through-hole electrodes (5) on the periphery thereof, and an optical sensor element (3) mounted on the glass lid substrate, and has a structure in which the glass lid substrate and the glass substrate with a cavity are bonded together. By hermetically sealing with the glass substrates, high reliability is secured. By using the divided through-hole electrodes, the package size is reduced and the number of devices which can be produced in a batch in the manufacture increases, which enables cost reduction.
Public/Granted literature
- US20130134300A1 OPTICAL SENSOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2013-05-30
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