Invention Grant
US08946650B2 Particle beam device and method for analyzing and/or treating an object 有权
用于分析和/或处理物体的粒子束装置和方法

Particle beam device and method for analyzing and/or treating an object
Abstract:
A particle beam device and a method for analyzing and/or treating an object is disclosed. According to the described system, the position of a crossover on an optical axis of a particle beam device can be freely adjusted, even in the case of a fixed extractor potential and a fixed high voltage. The particle beam device has a first electrode unit with three electrode apparatuses, a second electrode unit with three electrode apparatuses, and an acceleration unit. The method according to the system described herein uses the particle beam device.
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