Invention Grant
US08946650B2 Particle beam device and method for analyzing and/or treating an object
有权
用于分析和/或处理物体的粒子束装置和方法
- Patent Title: Particle beam device and method for analyzing and/or treating an object
- Patent Title (中): 用于分析和/或处理物体的粒子束装置和方法
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Application No.: US13239577Application Date: 2011-09-22
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Publication No.: US08946650B2Publication Date: 2015-02-03
- Inventor: Michael Schnell
- Applicant: Michael Schnell
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: Muirhead and Saturnelli, LLC
- Priority: DE102010041813 20100930
- Main IPC: H01J37/12
- IPC: H01J37/12 ; H01J37/063 ; H01J37/26 ; H01J37/21

Abstract:
A particle beam device and a method for analyzing and/or treating an object is disclosed. According to the described system, the position of a crossover on an optical axis of a particle beam device can be freely adjusted, even in the case of a fixed extractor potential and a fixed high voltage. The particle beam device has a first electrode unit with three electrode apparatuses, a second electrode unit with three electrode apparatuses, and an acceleration unit. The method according to the system described herein uses the particle beam device.
Public/Granted literature
- US20120080594A1 PARTICLE BEAM DEVICE AND METHOD FOR ANALYZING AND/OR TREATING AN OBJECT Public/Granted day:2012-04-05
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