Invention Grant
- Patent Title: Multiple anode ion source
- Patent Title (中): 多阳极离子源
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Application No.: US13192251Application Date: 2011-07-27
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Publication No.: US08946651B2Publication Date: 2015-02-03
- Inventor: Paul Stephen McLeod , Kueir-Weei Chour
- Applicant: Paul Stephen McLeod , Kueir-Weei Chour
- Applicant Address: US CA Scotts Valley
- Assignee: Seagate Technology LLC
- Current Assignee: Seagate Technology LLC
- Current Assignee Address: US CA Scotts Valley
- Agency: Hall Estill Attorneys at Law
- Main IPC: C23C14/04
- IPC: C23C14/04 ; H01J27/02 ; H01J27/26 ; G11B5/84
Abstract:
An ion source is provided. The ion source comprises a first cylindrical anode and a second cylindrical anode. The first cylindrical anode is concentric with the second cylindrical anode. The ion source further comprises an electron source positioned within the first cylindrical anode or the second cylindrical anode.
Public/Granted literature
- US20110278156A1 MULTIPLE ANODE ION SOURCE Public/Granted day:2011-11-17
Information query
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