Invention Grant
- Patent Title: Ionization gauge with emission current and bias potential control
- Patent Title (中): 具有发射电流和偏置电位控制的电离计
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Application No.: US13051430Application Date: 2011-03-18
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Publication No.: US08947098B2Publication Date: 2015-02-03
- Inventor: Larry K. Carmichael , Jesse A. Weber , John H. Henry , Michael N. Schott , Gerardo A. Brucker , Kenneth D. Van Antwerp, Jr.
- Applicant: Larry K. Carmichael , Jesse A. Weber , John H. Henry , Michael N. Schott , Gerardo A. Brucker , Kenneth D. Van Antwerp, Jr.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Hamilton, Brook, Smith & Reynolds, P.C.
- Main IPC: G01L21/30
- IPC: G01L21/30 ; G01L21/32 ; H01J41/02

Abstract:
An ionization gauge that measures pressure has an electron source that emits electrons, and an anode that defines an ionization space. The gauge also includes a collector electrode to collect ions formed by an impact between the electrons and a gas and to measure pressure based on the collected ions. The electron source is dynamically varied in emission current between a plurality of emission levels dependent on pressure and a second parameter other than pressure. The ionization gauge may also vary various operating parameters of the gauge components according to parameters stored in a non-volatile memory and selected by a user.
Public/Granted literature
- US20110163754A1 Ionization Gauge With Emission Current And Bias Potential Control Public/Granted day:2011-07-07
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