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    Ionization gauge with operational parameters and geometry designed for high pressure operation
    1.
    发明授权
    Ionization gauge with operational parameters and geometry designed for high pressure operation 有权
    具有操作参数和几何设计用于高压操作的电离计

    公开(公告)号：US09404827B2

    公开(公告)日：2016-08-02

    申请号：US14174386

    申请日：2014-02-06

    Applicant: MKS Instruments, Inc.

    Inventor： Gerardo A. Brucker

    IPC: G01L21/30 ,  G01L21/32 ,  G01L21/34 ,  H01J41/02

    CPC classification number: G01L21/30 ,  G01L21/32 ,  G01L21/34 ,  H01J41/02

    Abstract: An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.

    Abstract translation: 用于测量压力和减少溅射产生的电离计包括产生电子的至少一个电子源。 电离计还包括收集由电子和气体分子之间的碰撞形成的离子的集电极。 电离计还包括阳极。 相对于集电极的偏置电压的阳极偏置电压被配置为在预定压力下切换以降低溅射碰撞的产量。

    IONIZATION GAUGE FOR HIGH PRESSURE OPERATION
    2.
    发明申请
    IONIZATION GAUGE FOR HIGH PRESSURE OPERATION 有权
    用于高压运行的离子化仪

    公开(公告)号：US20150300904A1

    公开(公告)日：2015-10-22

    申请号：US14377449

    申请日：2013-02-07

    Applicant: MKS Instruments, Inc.

    Inventor： Gerardo A. Brucker

    IPC: G01L19/06 ,  H01J41/02 ,  H01J1/52 ,  G01L21/30

    CPC classification number: G01L21/32 ,  G01L19/0627 ,  G01L21/30 ,  H01J1/52 ,  H01J41/02 ,  H01J41/04

    Abstract: An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.

    Abstract translation: 用于测量压力的电离计，同时控制在高压下操作时由溅射产生的沉积物的位置，包括至少一个发射电子的电子源和限定电离体积的阳极。 电离计还包括收集电极，其收集由电子和气体分子之间的碰撞形成的离子和电离体积中的原子，以提供气体压力输出。 电子源可以位于电离体积的末端，使得电子源暴露于从集电极电极和包膜表面溅射的原子通量被最小化。 或者，电离计可以包括离子化体积外的第一阴影，第一阴影位于电子源和集电极之间，以及可选地，在封套和电子源之间的第二阴影，使得原子溅射 该封套被禁止沉积在电子源上。

    Method for determining at least one physical parameter using a sensor unit
    5.
    发明授权
    Method for determining at least one physical parameter using a sensor unit 有权

    公开(公告)号：US09995839B2

    公开(公告)日：2018-06-12

    申请号：US15311937

    申请日：2015-05-22

    Applicant: Gerd Reime

    Inventor： Gerd Reime

    IPC: G01R27/28 ,  G01V3/10 ,  G01R27/26 ,  G01R27/00 ,  G01N27/02 ,  G01N27/62 ,  H01J41/02 ,  H01J41/00 ,  G01N27/64

    CPC classification number: G01V3/10 ,  G01N27/028 ,  G01N27/62 ,  G01N27/64 ,  G01R27/00 ,  G01R27/26 ,  G01R27/2611 ,  G01R27/267 ,  H01J41/00 ,  H01J41/02

    Abstract: In a method for determining at least one physical parameter, a sensor unit which is activated by at least one periodic excitation (1.4) is provided, wherein the sensor unit has at least one detection region in which changes of the parameter in the surroundings of the sensor unit lead to output signal (1.7) from the sensor unit. The sensor unit is wired such that if there are no changes of the parameter in the detection region the output signal (1.7) is a zero signal or virtually a zero signal at the output of the sensor unit, whereas if there are changes of the parameter in the detection region the output signal (1.7) is a signal that is not zero and has a specific amplitude and phase. In a closed control loop, the non-zero signal in the receive path is adjusted to zero using a control signal to achieve an adjusted state even in the presence of changes of the parameter in the detection region. The control signal is evaluated in order to determine the physical parameter. The output signal (1.7) from the sensor unit is reduced substantially to the fundamental wave of the excitation (1.4) and the output signal (1.7) is controlled to zero in the entire phase space by means of at least one pulse width modulation. A temperature-stable, fully digital measuring system is provided as a result of the fact that the at least one pulse width modulation itself generates a correction signal with a variable pulse width and possibly a variable phase which is then added to the output signal (1.7) from the sensor unit and the output signal is thereby controlled to zero in the entire phase space, wherein the pulse width of the correction signal and/or the phase of the correction signal is/are determined by the deviations of the output signal (1.7) from zero.

    Miniature ionization gauge utilizing multiple ion collectors
    7.
    发明授权
    Miniature ionization gauge utilizing multiple ion collectors 有权

    公开(公告)号：US6046456A

    公开(公告)日：2000-04-04

    申请号：US276985

    申请日：1999-03-26

    Applicant: Daniel Granville Bills

    Inventor： Daniel Granville Bills

    IPC: G01L21/30 ,  H01J41/02 ,  H01J41/04 ,  H01J41/10 ,  H01J49/04 ,  G01L21/32

    CPC classification number: H01J41/04

    Abstract: An ionization gauge including a source of electrons; an open anode defining an anode volume, where the source of electrons is disposed outside the anode volume; a plurality of ion collector electrodes disposed within the anode volume; a plurality of axially extending anode support posts for supporting the open anode, the anode support posts being electrically connected to the open anode; and the plurality of ion collector electrodes being respectively located sufficiently close to the plurality of axially extending anode support posts so as to substantially repel the electrons from the anode support posts.

    Photo-ionization detector for volatile gas measurement
    8.
    发明授权
    Photo-ionization detector for volatile gas measurement 失效
    用于挥发性气体测量的光电离检测器

    公开(公告)号：US5773833A

    公开(公告)日：1998-06-30

    申请号：US620635

    申请日：1996-03-22

    Applicant: Peter C. Hsi

    Inventor： Peter C. Hsi

    IPC: G01N27/64 ,  G01N27/66 ,  G01N33/00 ,  H01J41/02

    CPC classification number: G01N27/64 ,  G01N27/66 ,  G01N33/0047 ,  H01J41/02

    Abstract: A photo-ionization detector (PID) which measures volatile organic gas uses electrically insulated parallel plates to energize a miniaturized gas discharge UV lamp and an energy efficient method to modulate the UV lamp intensity and reduce power consumption. A miniaturized centrifugal pump is integrated into the PID to provide active sampling for fast response to volatile gas. An ionization chamber in the PID includes a UV shield which protects a measurement electrode from UV light and a UV monitor which measures changes in UV intensity due to external interferences and UV lamp variations. A microprocessor in the PID uses measurements from the measurement electrode and from the UV monitor to accurately account for UV intensity variations when determining a volatile gas concentration.

    Abstract translation: 测量挥发性有机气体的光电离检测器（PID）使用电绝缘平行板来激励小型化气体放电UV灯和能量效率方法来调节UV灯强度并降低功耗。 PID集成了一台小型化离心泵，为挥发性气体快速响应提供主动取样。 PID中的电离室包括保护测量电极免受紫外线的UV屏蔽和测量由于外部干扰和UV灯变化引起的UV强度变化的UV监视器。 PID中的微处理器使用来自测量电极和UV监测器的测量来精确计算确定挥发性气体浓度时的紫外线强度变化。

    Method and apparatus for checking the signal path of a measuring system
    9.
    发明授权
    Method and apparatus for checking the signal path of a measuring system 失效
    用于检查测量系统的信号路径的方法和装置

    公开(公告)号：US4806765A

    公开(公告)日：1989-02-21

    申请号：US916822

    申请日：1986-10-09

    Applicant: Raymond Heinen

    Inventor： Raymond Heinen

    IPC: G01N27/62 ,  G01R35/00 ,  H01J41/02 ,  H01J47/02 ,  H01J49/02 ,  H01J49/06 ,  G01T1/185 ,  B01D59/44

    CPC classification number: H01J49/025 ,  G01R35/00

    Abstract: The disclosure relates to a method and apparatus for checking the signal path in a measuring system of the type having a collector for charged particles and an amplifier connected to its output to form a voltage or current signal. To permit sensitivity tests with currents on the order of 10.sup.-12 A and less, it is proposed that a capacitive current, produced by means of a influencing electrode situated in the vicinity of the charge collector, be fed into the charge collector. An electrode already present in the measuring system can be used as the influencing electrode.

    Abstract translation: 本公开涉及一种用于检查具有用于带电粒子的集电极的类型的测量系统中的信号路径的方法和装置，以及连接到其输出端以形成电压或电流信号的放大器。 为了允许10-12A以下的电流进行灵敏度测试，提出通过位于集电器附近的影响电极产生的电容电流被馈送到电荷收集器中。 已经存在于测量系统中的电极可以用作影响电极。

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