Invention Grant
- Patent Title: Contamination reduction electrode for particle detector
- Patent Title (中): 用于颗粒检测器的污染还原电极
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Application No.: US14204278Application Date: 2014-03-11
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Publication No.: US08963084B2Publication Date: 2015-02-24
- Inventor: Stefan Lanio
- Applicant: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik GmbH
- Applicant Address: DE Heimstetten
- Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik GmbH
- Current Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik GmbH
- Current Assignee Address: DE Heimstetten
- Agency: Patterson & Sheridan, LLP
- Priority: EP12175165 20120605
- Main IPC: H01J37/244
- IPC: H01J37/244 ; H01J37/28
Abstract:
A charged particle detector arrangement is described. The detector arrangement includes a detection element and a collector electrode configured to collect charged particles released from the detection element upon impact of signal charged particles.
Public/Granted literature
- US20140191127A1 CONTAMINATION REDUCTION ELECTRODE FOR PARTICLE DETECTOR Public/Granted day:2014-07-10
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