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US08966990B2 MEMS devices exhibiting linear characteristics 有权
具有线性特征的MEMS器件

MEMS devices exhibiting linear characteristics
Abstract:
A micro electro mechanical system device has a first subassembly having sensor element including a coupler, and a second subassembly including a comb drive. The comb drive having stator plates and rotor plates and the coupler configured to displace the rotor plates relative to the stator plates providing a variable capacitance dependent on the displacement of the rotor plate.
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