Invention Grant
- Patent Title: MEMS devices exhibiting linear characteristics
- Patent Title (中): 具有线性特征的MEMS器件
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Application No.: US13371024Application Date: 2012-02-10
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Publication No.: US08966990B2Publication Date: 2015-03-03
- Inventor: Jason Vaughn Clark
- Applicant: Jason Vaughn Clark
- Applicant Address: US IN West Lafayette
- Assignee: Purdue Research Foundation
- Current Assignee: Purdue Research Foundation
- Current Assignee Address: US IN West Lafayette
- Agency: Brinks Gilson & Lione
- Agent John C. Bacoch
- Main IPC: G01L9/12
- IPC: G01L9/12 ; H01G5/16 ; G01P15/125

Abstract:
A micro electro mechanical system device has a first subassembly having sensor element including a coupler, and a second subassembly including a comb drive. The comb drive having stator plates and rotor plates and the coupler configured to displace the rotor plates relative to the stator plates providing a variable capacitance dependent on the displacement of the rotor plate.
Public/Granted literature
- US20120204643A1 MEMS DEVICES EXHIBITING LINEAR CHARACTERISTICS Public/Granted day:2012-08-16
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