Invention Grant
- Patent Title: Device to detect thermal radiation with high resolution method to manufacture and use the device
- Patent Title (中): 以高分辨率方式检测热辐射的装置制造和使用该装置
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Application No.: US12680286Application Date: 2008-09-29
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Publication No.: US08969811B2Publication Date: 2015-03-03
- Inventor: Carsten Giebeler , Matthias Schreiter , Uwe Rettig
- Applicant: Carsten Giebeler , Matthias Schreiter , Uwe Rettig
- Applicant Address: GB Edinburgh
- Assignee: Pyreos Ltd.
- Current Assignee: Pyreos Ltd.
- Current Assignee Address: GB Edinburgh
- Agency: Edell, Shapiro & Finnan, LLC
- Priority: DE102007046451 20070928
- International Application: PCT/EP2008/008280 WO 20080929
- International Announcement: WO2009/043571 WO 20090409
- Main IPC: G01J5/02
- IPC: G01J5/02 ; H01L31/101 ; G01J5/04 ; G01J5/06 ; G01J5/34 ; H01L37/02

Abstract:
A device to detect thermal radiation has a membrane and at least two detector elements that are respectively set up to transduce thermal radiation into an electrical signal and are mounted situated next to one another on the membrane, wherein at least one heat dissipation path is provided on the side of the membrane facing towards the detector elements and/or on the side of the membrane facing away from the detector elements, which heat dissipation path has a higher heat conductivity than the membrane and is connected with the detector elements in a heat-conductive manner via the membrane so that heat can be discharged from the detector elements with the heat dissipation path, whereby the response time of the detector elements is short; and wherein at least one heat barrier that has a lower heat conductivity than the membrane and extends between the detector elements is provided integrated into the membrane, such that a heat conduction in the membrane from the one detector element to the other detector element is prevented by the heat barrier; whereby the crosstalk of the detector elements is low.
Public/Granted literature
- US20110049369A1 Device to detect thermal radiation with high resolution method to manufacture and use the device Public/Granted day:2011-03-03
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