Invention Grant
- Patent Title: Scanning electron microscope with a table being guided by rolling friction elements
- Patent Title (中): 扫描电子显微镜，桌面由滚动摩擦元件引导
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Application No.: US13640560Application Date: 2011-05-11
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Publication No.: US08969828B2Publication Date: 2015-03-03
- Inventor: Naoki Sakamoto , Kaname Takahashi , Shigeru Haneda , Shinsuke Kawanishi
- Applicant: Naoki Sakamoto , Kaname Takahashi , Shigeru Haneda , Shinsuke Kawanishi
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Mattingly & Malur, P.C.
- Priority: JP2010-115889 20100520
- International Application: PCT/JP2011/002608 WO 20110511
- International Announcement: WO2011/145292 WO 20111124
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/28
Abstract:
This invention stabilizes positioning and provides improved positioning accuracy in a scanning electron microscope provided with stage-driving means utilizing an effect of rolling friction.In this scanning electron microscope that includes a sample stage equipped with an x-table, a y-table, a z-table, a rotation table, and a tilting table, and moved by means of stepping motors each connected to a ball screw via a coupling, a sliding friction element is disposed at a position close to the ball screw, between the x-table and the y-table and between a tilting base and the x-table.
Public/Granted literature
- US20130048854A1 SCANNING ELECTRON MICROSCOPE Public/Granted day:2013-02-28
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