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US08974989B2 Lithographic mask, lithographic apparatus and method 有权
平版印刷掩模,光刻设备和方法

Lithographic mask, lithographic apparatus and method
Abstract:
A lithographic mask has a substrate substantially transmissive for radiation of a certain wavelength, the substrate having a radiation absorbing material in an arrangement, the arrangement configured to apply a pattern to a cross-section of a radiation beam of the certain wavelength, wherein the absorbing material has a thickness which is substantially equal to the certain wavelength divided by a refractive index of the absorbing material.
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