Invention Grant
- Patent Title: Lithographic mask, lithographic apparatus and method
- Patent Title (中): 平版印刷掩模,光刻设备和方法
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Application No.: US13743231Application Date: 2013-01-16
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Publication No.: US08974989B2Publication Date: 2015-03-10
- Inventor: Jozef Maria Finders
- Applicant: Jozef Maria Finders
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G03F1/38
- IPC: G03F1/38

Abstract:
A lithographic mask has a substrate substantially transmissive for radiation of a certain wavelength, the substrate having a radiation absorbing material in an arrangement, the arrangement configured to apply a pattern to a cross-section of a radiation beam of the certain wavelength, wherein the absorbing material has a thickness which is substantially equal to the certain wavelength divided by a refractive index of the absorbing material.
Public/Granted literature
- US20130183611A1 LITHOGRAPHIC MASK, LITHOGRAPHIC APPARATUS AND METHOD Public/Granted day:2013-07-18
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