Invention Grant
- Patent Title: Charged-particle beam exposure apparatus and method of manufacturing article
- Patent Title (中): 带电粒子束曝光装置及其制造方法
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Application No.: US14084938Application Date: 2013-11-20
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Publication No.: US08981321B2Publication Date: 2015-03-17
- Inventor: Hirohito Ito
- Applicant: Canon Kabushiki Kaisha
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2010-259523 20101119
- Main IPC: H01J37/00
- IPC: H01J37/00 ; H01J37/317 ; B82Y10/00 ; B82Y40/00 ; H01J3/26

Abstract:
A charged-particle beam exposure apparatus which includes a deflector that deflects a charged-particle beam, and a stage mechanism that drives a substrate, and draws a pattern on the substrate while scanning the charged-particle beam in a main-scanning direction by the deflector and scanning the substrate in a sub-scanning direction by the stage mechanism. The apparatus includes a blanker unit configured to control irradiation and unirradiation of the substrate with the charged-particle beam, and a controller configured to control the deflector to deflect the charged-particle beam in the sub-scanning direction by an amount of driving of the substrate in the sub-scanning direction by the stage mechanism during a period of time from stop of drawing on the substrate until restart thereof when the drawing on the substrate is stopped and then restarted while the substrate is driven in the sub-scanning direction by the stage mechanism.
Public/Granted literature
- US20140070112A1 CHARGED-PARTICLE BEAM EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2014-03-13
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