Invention Grant
US08987086B2 MIM capacitor with lower electrode extending through a conductive layer to an STI
有权
MIM电容器,其下电极延伸穿过导电层至STI
- Patent Title: MIM capacitor with lower electrode extending through a conductive layer to an STI
- Patent Title (中): MIM电容器,其下电极延伸穿过导电层至STI
-
Application No.: US13555831Application Date: 2012-07-23
-
Publication No.: US08987086B2Publication Date: 2015-03-24
- Inventor: Kuo-Cheng Ching , Kuo-Chi Tu , Chun-Yao Chen
- Applicant: Kuo-Cheng Ching , Kuo-Chi Tu , Chun-Yao Chen
- Applicant Address: TW Hsin-chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L29/94
- IPC: H01L29/94 ; H01L27/08 ; H01L27/06 ; H01L27/108 ; H01L49/02

Abstract:
The present disclosure provides a semiconductor device that includes a semiconductor substrate, an isolation structure formed in the semiconductor substrate, a conductive layer formed over the isolation structure, and a metal-insulator-metal (MIM) capacitor formed over the isolation structure. The MIM capacitor has a crown shape that includes a top electrode, a first bottom electrode, and a dielectric disposed between the top electrode and the first bottom electrode, the first bottom electrode extending at least to a top surface of the conductive layer.
Public/Granted literature
- US20120289021A1 METAL-INSULATOR-METAL STRUCTURE FOR SYSTEM-ON-CHIP TECHNOLOGY Public/Granted day:2012-11-15
Information query
IPC分类: