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US08987682B2 Specimen positioning device, charged particle beam system, and specimen holder 有权
试样定位装置，带电粒子束系统和试样架

  • Patent Title: Specimen positioning device, charged particle beam system, and specimen holder
  • Patent Title (中): 试样定位装置，带电粒子束系统和试样架
  • Application No.: US14101460
    Application Date: 2013-12-10
  • Publication No.: US08987682B2
    Publication Date: 2015-03-24
  • Inventor: Mitsuru Hamochi
  • Applicant: JEOL Ltd.
  • Applicant Address: JP Tokyo
  • Assignee: JEOL Ltd.
  • Current Assignee: JEOL Ltd.
  • Current Assignee Address: JP Tokyo
  • Agency: The Webb Law Firm
  • Priority: JP2012-269200 20121210
  • Main IPC: H01J37/20
  • IPC: H01J37/20 ;  G21K5/08 ;  G21K5/10 ;  H01J37/26
Specimen positioning device, charged particle beam system, and specimen holder
Abstract:
A specimen positioning device (100) is for use in or with a charged particle beam system having a specimen chamber (1) and has: a base (10) provided with a hole (12) in operative communication with the specimen chamber (1); a specimen holder (20) movably mounted in the hole (12) and having a first portion (22) and a second portion (24); and a first portion support portion (40) supporting the first portion (22) in the specimen chamber (1). The second portion (24) supports the first portion (22) via a resilient member (34).
Abstract(Chinese):

一种试样定位装置（100）用于具有试样室（1）的带电粒子束系统中或与其一起使用，具有：具有与试样室（1）可操作连通的孔（12）的基座（10） ; 可移动地安装在孔（12）中并且具有第一部分（22）和第二部分（24）的样本保持器（20）; 以及支撑所述标本室（1）中的所述第一部分（22）的第一部分支撑部分（40）。 第二部分（24）经由弹性构件（34）支撑第一部分（22）。

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