Invention Grant
- Patent Title: Ruthenium film-forming material and ruthenium film-forming method
- Patent Title (中): 钌成膜材料和钌膜形成方法
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Application No.: US13503899Application Date: 2010-10-20
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Publication No.: US08999442B2Publication Date: 2015-04-07
- Inventor: Ryuichi Saito , Kang-go Chung , Hideki Nishimura , Tatsuya Sakai
- Applicant: Ryuichi Saito , Kang-go Chung , Hideki Nishimura , Tatsuya Sakai
- Applicant Address: JP Tokyo
- Assignee: JSR Corporation
- Current Assignee: JSR Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2009-248383 20091029; JP2010-099416 20100423
- International Application: PCT/JP2010/068490 WO 20101020
- International Announcement: WO2011/052453 WO 20110505
- Main IPC: B05D1/30
- IPC: B05D1/30 ; B05D1/02 ; B05D5/00 ; B05D7/00 ; B28B19/00 ; B29B15/10 ; C23C18/00 ; C23C20/00 ; C23C28/00 ; C23C16/18 ; C07C49/92 ; C07F15/00 ; C23C16/00 ; H01L21/768 ; H01L49/02

Abstract:
Disclosed is a ruthenium film-forming material having a lower melting point and a higher vapor pressure that facilitates supply of the material onto a base and moreover enables a high-quality ruthenium film to be obtained.A ruthenium film-forming material includes a compound represented by general formula (1) below (wherein R1 is independently at each occurrence a hydrogen atom, a halogen atom, a hydrocarbon group having 1 to 4 carbon atoms or a halogenated hydrocarbon group having 1 to 4 carbon atoms; R2 is independently at each occurrence a halogenated hydrocarbon group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms or a halogenated alkoxy group having 1 to 4 carbon atoms, with the proviso that R1 and R2 are mutually differing groups; R3 is independently at each occurrence a hydrogen atom or a hydrocarbon group having 1 to 4 carbon atoms; and L is an unsaturated hydrocarbon compound having 4 to 10 carbon atoms and having at least two double bonds).
Public/Granted literature
- US20120282414A1 RUTHENIUM FILM-FORMING MATERIAL AND RUTHENIUM FILM-FORMING METHOD Public/Granted day:2012-11-08
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