Surface enhanced Raman scattering (SERS) substrates may be fabricated using a shadow mask assisted evaporation (SMAE) method to provide for enhanced detection sensitivity with respect to target molecules that are located upon, and sensitized by, the SERS enhanced substrates. Such SERS substrates provide a two dimensional array of repeating nanostructures that may include, but are not limited to nano-pillar, nano-nib, nano-elliptical cylinder and nano-triangular tip nanostructures, any of which may be augmented with gold nanospheres. The particular SERS enhanced substrates in accordance with the embodiments, in particular when augmented with gold nanospheres, provide desirably enhanced sensitivity.