Invention Grant
- Patent Title: Coating device including substrate carrying, application and removal units
- Patent Title (中): 涂布装置,包括载体,涂布和去除单元
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Application No.: US13116941Application Date: 2011-05-26
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Publication No.: US09010270B2Publication Date: 2015-04-21
- Inventor: Futoshi Shimai , Akihiko Sato , Tsutomu Sahoda , Kenji Maruyama
- Applicant: Futoshi Shimai , Akihiko Sato , Tsutomu Sahoda , Kenji Maruyama
- Applicant Address: JP Kawasaki-shi
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kawasaki-shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2010-123193 20100528
- Main IPC: B05C5/00
- IPC: B05C5/00 ; B05D3/00 ; H01L21/67 ; H01L21/677 ; B05C5/02 ; B05C9/04 ; B05B13/02 ; B05D1/00 ; B05D1/26 ; G11B5/842

Abstract:
Provided is a coating device including: a substrate carrying unit which rotatably holds a substrate while the substrate is upright and is able to dispose the held substrate at a first position and a second position; an application unit which includes a liquid material nozzle ejecting a liquid material to each of first and second surfaces of the substrate disposed at the first position; and a removal unit which includes an accommodation mechanism accommodating a part of the peripheral edge portion of the substrate disposed at the second position and a cleaning liquid ejection mechanism ejecting a cleaning liquid to the peripheral edge portion and removes the liquid material of the peripheral edge portion.
Public/Granted literature
- US20110290178A1 COATING DEVICE Public/Granted day:2011-12-01
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