Invention Grant
- Patent Title: Load port
- Patent Title (中): 加载端口
-
Application No.: US13364789Application Date: 2012-02-02
-
Publication No.: US09010384B2Publication Date: 2015-04-21
- Inventor: Takehiko Yoshimura , Tatsuhiko Nagata , Masaru Seki , Yoshinori Cho
- Applicant: Takehiko Yoshimura , Tatsuhiko Nagata , Masaru Seki , Yoshinori Cho
- Applicant Address: JP Tokyo
- Assignee: Right Mfg. Co. Ltd.
- Current Assignee: Right Mfg. Co. Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Dilworth & Barrese, LLP.
- Main IPC: B65B31/04
- IPC: B65B31/04 ; H01L21/54 ; B01L1/00 ; H01L21/677
Abstract:
A load part has a nozzle unit having outlets for generating outflow and/or inflow of gas used for replacing the atmosphere of a wafer storage container, in a direction approximately parallel to spaces between adjacent wafers being stored, are a driving unit for extending the nozzle unit to a door opening portion.
Public/Granted literature
- US20130000757A1 LOAD PORT Public/Granted day:2013-01-03
Information query
IPC分类:
