Invention Grant
US09012848B2 Laser power and energy sensor utilizing anisotropic thermoelectric material
有权
激光功率和能量传感器利用各向异性热电材料
- Patent Title: Laser power and energy sensor utilizing anisotropic thermoelectric material
- Patent Title (中): 激光功率和能量传感器利用各向异性热电材料
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Application No.: US13944830Application Date: 2013-07-17
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Publication No.: US09012848B2Publication Date: 2015-04-21
- Inventor: Robert Semerad , Erik Krous , James Schloss
- Applicant: Coherent, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Coherent, Inc.
- Current Assignee: Coherent, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Morrison & Foerster LLP
- Main IPC: G01J5/00
- IPC: G01J5/00 ; H01L31/0368 ; G01J5/12 ; G01K17/00 ; G01J1/42 ; G01J5/04

Abstract:
A laser-radiation sensor includes a copper substrate on which is grown an oriented polycrystalline buffer layer surmounted by an oriented polycrystalline sensor-element of an anisotropic transverse thermoelectric material. An absorber layer, thermally connected to the sensor-element, is heated by laser-radiation to be measured and communicates the heat to the sensor-element, causing a thermal gradient across the sensor-element. Spaced-apart electrodes in electrical contact with the sensor-element sense a voltage corresponding to the thermal gradient as a measure of the incident laser-radiation power.
Public/Granted literature
- US20140091304A1 LASER POWER AND ENERGY SENSOR UTILIZING ANISOTROPIC THERMOELECTRIC MATERIAL Public/Granted day:2014-04-03
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