Invention Grant
- Patent Title: Method of manufacturing a vertical-type semiconductor device and method of operating a vertical-type semiconductor device
- Patent Title (中): 制造垂直型半导体器件的方法和操作垂直型半导体器件的方法
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Application No.: US13750066Application Date: 2013-01-25
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Publication No.: US09029939B2Publication Date: 2015-05-12
- Inventor: Yong-Hoon Son , Jong-Wook Lee , Jong-Hyuk Kang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Onello & Mello, LLP
- Priority: KR10-2008-0052368 20080604
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L27/108 ; H01L29/66

Abstract:
In a vertical-type semiconductor device, a method of manufacturing the same and a method of operating the same, the vertical-type semiconductor device includes a single-crystalline semiconductor pattern having a pillar shape provided on a substrate, a gate surrounding sidewalls of the single-crystalline semiconductor pattern and having an upper surface lower than an upper surface of the single-crystalline semiconductor pattern, a mask pattern formed on the upper surface of the gate, the mask pattern having an upper surface coplanar with the upper surface of the single-crystalline semiconductor pattern, a first impurity region in the substrate under the single-crystalline semiconductor pattern, and a second impurity region under the upper surface of the single-crystalline semiconductor pattern. The vertical-type pillar transistor formed in the single-crystalline semiconductor pattern may provide excellent electrical properties. The mask pattern is not provided on the upper surface of the single-crystalline semiconductor pattern in the second impurity region, to thereby reduce failures of processes.
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