Invention Grant
US09046716B2 Device for supporting substrate and examiner for seal pattern of LCD cell using the same 有权
用于支撑基板的装置和用于使用其的LCD单元的密封图案的检查器

Device for supporting substrate and examiner for seal pattern of LCD cell using the same
Abstract:
Disclosed are a substrate support apparatus and an apparatus for examining the seal pattern of an LCD cell. The substrate support apparatus includes a movable stage provided with drawing nozzles for attaching a substrate to an upper surface and adapted to rotate by a predetermined angle; a fixed stage spaced from the movable stage and provided with floating nozzles for ejecting air upward and drawing nozzles for drawing air downward; and a driving device coupled to the movable stage to rotate the movable stage. The apparatus for examining the seal pattern of an LCD cell includes the substrate support apparatus; and a gantry unit including support platforms positioned on both sides of the substrate support apparatus, a bridge positioned above the substrate support apparatus to connect the support platforms, and a correction device coupled to the bridge to examine and repair a seal pattern of a substrate.
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